英国Nanobean NB5 电子束光刻机
具有良好的稳定性，平均正常运行时间超过93%
规格:
束流电压范围为: 20kV - 100kV
光刻胶的特征尺寸: <8nm (光刻精度)
500um区域拼接/叠加误差: 小于25nm
自动装载5卡盘气锁系统
NB5发展目标:
改进设计和组件以减少日常服务需求。
实现每年少于5%的机器故障停机时间。
提高性能
便于批量生产。
NB5系统将为进一步发展高偏转速度和进一步集成电子提供平台。
The nB4 is a generation ahead of the current competition and with its field-proven performance has gained acceptance in the market place. It has excellent stability and has demonstrated an average uptime of greater than 93%. NanoBeam now introduces the nB5 which has been developed to further reduce delivery times and service costs.
NB5 development aims:
Refine design and components to reduce routine service requirements.
Achieve a machine-fault-downtime of less than 5% annually.
Enhance performance
Facilitate volume production.
Specification:
Beam Voltage range 20kV - 100kV
Feature size on resist <8nm
Stitching/overlay error <25nm for 500um field
Automatic loading 5 chuck airlock system
The nB5 system will provide a platform for further development to high deflection speed and further integrated electronics.
注：该仪器未取得中华人民共和国医疗器械注册证，不可用于临床诊断或治疗等相关用途
售后服务承诺
免费上门安装：是
保修期：1年
是否可延长保修期：否
保内维修承诺：经确认质量问题，免费更换。
报修承诺：24小时内到达现场并开始维修
免费仪器保养：6个月一次。
免费培训：免费安装及技术培训
现场技术咨询：无
