RF-340 系列匹配网络自动整合装置

RF-340 系列匹配网络自动整合装置

和产生等离子体的13.56MHz高频电源组合，与负载进行匹配的自动调整装置 (匹配箱 + 控制器) 。

Features特点

RF-340 series Matching Network

An automatic matching device to match the load to the 13.56 MHz RF power supply for plasma generation. Matching box + Controller

 

Functions功能

Preset (8 point)

Records the settings of each of the variable capacitors for the points that have been matched.

Auto-preset

Auto control driving the variable capacitors to the preset settings when output is zero, and then outputting the RF

Auto-delay

No immediate reaction to sudden changes in the load, such as arcing, with automatic operation after a specified　period of time has elapsed.

Variable capacitor position display

Variable capacitor drive range setting

Control of the variable capacitor drive range setting during automatic operation

Vdc display

Vdc meter relay

Vdc stabilization control

Vpp display

Vpp meter relay

Load impedance display

When matching is obtained, the plasma impedance is calculated and displayed

CE compliant （excluding some devices）

技术规格：

Matching box匹配箱
		RF-34021	RF-34031	RF-34041
Permitted transmitted power		1.5kW	3kW	6kW
Input connector		N type	LS2 type
Frequency		13.56MHz
Input impedance		50 Ω
Fan power supply		DC 24V (supplied from the controller)
Matching control		Vacuum variable capacitor
Tuning control		Vacuum variable capacitor
Residual reflected power		Within 10% of the input power
Cooling method		Water (2～3L/min)	Water (2.5～3L/min)
Dimensions (mm)	Width	370	470
	Depth	300	370
	Height	205	246
Mass (kg)		15	19
Controller
Input power		DC 24V, 4A ( to be provided separately )
Dimensions (mm)		140 (W) × 305 (D) × 145 (H)
Control method		Digital control
Mass		1.5kg

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