RF-120系列高频电源

RF-120系列高频电源

是溅射、刻蚀、CVD、离子镀等薄膜制备/加工使用的、用于生成等离子体的13.56MHz高频电源（RF电源）。

特性：

A high-frequency power supply (RF power supply) creating 13.56 MHz plasma for thin-film processing and etching, including sputtering, etching, CVD, and ion plating.

The RF-120 series includes DeviceNet, RS232C, and analog interfaces as standard. These are multi-functional powers supplies that offer performance like pattern operation, arcing cut/count functions, and recall of past data. There is also a matching network to facilitate the combination of each power supply and connected device.

功能：

Pattern operation
Automatic output control based on output and time data preset in the RF power supply
Up to 3 patterns with a maximum of 5 points per pattern can be set

Arcing cut

Arcing count
Counts the number of times that arcing occurs, and halts output when a preset number is reached

Pulse operation (option)
Pulse frequency: 100 Hz ~ 10 kHz, duty: 20 ~ 80%
*A pulse-generator must be purchased separately

Synchronous operation
Can be connected to other RF power supplies and operated synchronously

Slow-start / Slow down

Reflectance limit continuation control
When the reflected power limiter is triggered, the elapsed time is measured and when the specified amount of time is reached, output is halted

Past data memory
When an abnormality occurs, the internal data from the prior 30 seconds is output

Matching completion confirmation
When the reflected power is less than the specified value, a confirmation signal is output

Arcing cut operation confirmation

Limiter operation confirmation

Incident/ Reflected power monitor output

Input power supply confirmation

RF output confirmation

Error check signal output

Various interfaces supported as standard
DeviceNet, RS232C, analo

CE mark compliant (excluding some devices)

选项功能

Manual operation board  (RF-56000)

Out-of-phase signal generator (Phase Shifter)

Water-cooled input terminal (for ion plating)

应用案例

产品规格：

RF-12010	RF-12020	RF-12030	RF-12040
zei大输出功率		750W	1.5kW	3kW	6kW
输出接头		N 型		LS2 型
输入电压		AC 200V ±10V, 三相, 50/60 Hz
输入电流		AC 5A	AC 8A	AC 20A	AC 35A
振荡方式		他激式晶体振荡
振荡频率		13.56MHz ±0.005%
输出稳定度		±0.5％以下 (zei大输出功率, 对50Ω电阻负载)
波动		1％以下 (zei大输出功率, 对50Ω电阻负载)
总谐波失真		- 50dB (zei大输出功率时)
制冷方式		强制空冷		水冷
				5～7L/分	5～6.5L/分
外观尺寸 (mm)	Wide	481	481	481	481
	Depth	430	504	504	510
	Hight	149	199	199	349
重量(kg)		18	25	27	55

*RF-12040由单元1（149mmH/25kg）和单元2（199mmH/30kg）构成。
*外观尺寸不包括突起部分（背面的风扇等）。RF-56000  外观尺寸 ： 105mm(W)×305mm(D)×145mm(H)

RF-120系列高频电源由日本电子株式会社(JEOL) 为您提供，如您想了解更多关于RF-120系列高频电源报价、参数等信息 ，欢迎来电或留言咨询。