一、仪器简介:(Description)
(1)放大倍率15万倍(Magnification Max 150,000x)
(2)采用二次电子和背散射电子双重探测器(Signal Detection: SE Detector+BSE Detector)
(3)1KV~30KV加速电压选择,图像分辨率高(Accelerating Voltage:1kV to 30Kv,High image resolution)
(4)通过选配EDS可进行元素成份分析(EDS is optional, for component analysis)
(5)冷却台的安装可在无前处理情况下对水分取样分析(Installation a cooling Stage, Can measure aqueous samples without pretreatment)
(6)高/低真空配置缩短前处理过程(High&Low Vacuum System)
(7)CCD摄像头的安装可对载物台内部观察(The CCD camera is mounted to view the inside of the stage)
(8)Tilt(0~45)载物台配置(可选择)(Tilt Stage configuration( optional))
二、技术参数:(Product specifications)
分辨率(Resolution)
| 5nm (30kV, SE Image) | |
10nm (30kV, BSE Image) | ||
放大倍率(Magnification) | 30x~150,000x | |
加速电压(Accelerating Voltage) | 1kV to 30kV (1kV/5kV/10 kV /15kV/20kV/30 kV -6 step) | |
图像检测 (Signal Detection)`
| 二次电子图像-(SEI)-Secondary Electron Image | |
背散射电子图像(BSEI)-Backscattered Electron Image | ||
* Multi Detector (SEI+BSEI) | ||
观察模式 Observation mode | Standard Mode | |
Auto mode | ||
电子枪系统(Electron Gun) | ||
灯丝类型(Filament type) | 预对中钨灯丝(Pre Centered tungsten filament Cartridge) | |
偏压系统(Bias voltage system) | 自动偏压方式(Automatic mode) | |
电子枪校正 (Electron gun alignment) | 手动方式(Manual mode) | |
透镜构成(Lens system) | ||
聚光镜(Focus Lens) | 2段式磁线圈透镜 (2-stage Electromagnetic Condenser Lens) | |
物镜(Objective Lens) | 1段式磁线圈透镜(1-stage Electromagnetic Objective Lens) | |
探测器类型(Detector type) | SE Detector/ BSE Detector | |
载物台系统( Stage System) | 自动或者手动(Auto or Manual) | |
载物台移动(Stage Traverse) | 5轴操控或自动操控5 axis System,AUTO | |
图像偏移(Image shift) | Image shift X, Y Image Shift (±150um) | |
样品MAX尺寸 (Max Sample size) | 高度35mm时MAX直径80mm 80mm in diameter, 35mm in height | |
图像扫描 (Image Scanning system) | 快速扫描 (Fast Scan): 320x240 (Scan time: 0.1 sec.) | |
低速扫描 (Slow Scan): 640x480 (Scan time: 3 sec.) | ||
图片模式1(Photo Mode 1): 1280x960 (Scan time: 30sec.) | ||
图片模式2(Photo Mode 2): 2560x1920 (Scan time: 60sec.) 3(Photo Mode 2): 5120x3840 (Scan time: 120sec.) | ||
自动功能 (Automatic Function) | 自动启动(Auto start),自动聚焦(Auto focus),自动亮度对比度调节(Auto Brightness/Contrast) | |
图像存储格式(Image format) | BMP, JPEG, PNG,TIFF | |
数据显示(Data display) | 放大倍率(Magnification),探测器类型(Detector type),电压(Accelerating Voltage),真空模式(Vacuum mode),Logo(Text), Date and time,Text marker,比例尺(scale bar)等 | |
真空系统(Vacuum system) | 全自动型/高真空模式+低真空模式(Fully Automatic Multi mode) (旋转式机械泵)Rotary Pump/100Liters/min (涡轮式分子泵) Turbo Molecular Pump/ 70Liters/sec 抽真空时间(pump down time):2分钟以内 (less than 2 minutes) | |
操控系统(Control unit system) | 鼠标和键盘(Mouse ,Keyboard) | |
PC:台式电脑(Desk Top) OS : Microsoft Windows 7 CPU : Intel CoreTM i5 or High version Memory / HDD : 4GB / 500GB or High version USB 2.0 | ||
软件(Software function) | 图像文件打开,编辑,存储功能(Image file open, edit, Save function) 长度,面积,角度等测量功能(Length, area, angle measuring) | |
体积( Volume) | 设备主机(Main Unit)-410(W)×660(D)× 600(H)mm……1set 控制主机(controller)-410(W)×290(D)×520(H)mm……1set 外置真空泵(External vacuum pump)-400(W)×160(D)×340(H)mm …1set | |
重量 (Weight) | 105kg | |
设备环境 (Equipment environment) | 温度(Temperature):15℃~30℃ 电源(Power source): Single phase 100~240V AC, 1KW, 50/60Hz |
注:该仪器未取得中华人民共和国医疗器械注册证,不可用于临床诊断或治疗等相关用途