SPI OPC-60A锇膜镀膜仪
在SEM或者FE-SEM研究领域，有时对导电膜层要求非常高，这时常规的金、铂等金属已经不能满足要求。此时，锇膜就是比较好的选择。即使仅镀几个纳米厚度的膜，膜层也会获得非常好的导电性。OPC锇膜镀膜仪是一款划时代的镀膜仪器。
不同与常规的离子溅射和蒸镀的膜层加工，OPC锇膜镀膜仪采用了全新的四氧化锇气体压缩方式获得锇膜，质量更好，效率更高。不论是离子溅射还是蒸镀，当高倍观察时，膜层粒子本身的粒度过大带来的问题是不可避免的。而OPC锇膜镀膜仪很好的解决了这个问题。
仪器参数：
型号 | OPC-80T | OPC-60A |
腔室 | Hard glass chamber: 160mm(OD)x105mm(H) | Hard glass chamber: 120mm(OD)x73mm(H) |
膜厚 | a few - few dozen nm
| a few - few dozen nm
|
样品台 | Two holes for 10mm dia SEM holder, Two holes for 15mm dia SEM holder, and one hole for 32mm dia SEM holder | Seven holes for 10mm dia SEM holder, Four holes for 15mm dia SEM holder, or One hole for 32mm dia SEM holder |
镀膜种类 | Osmium(OsO4) | Osmium |
锇储存 | Detachable, sealing up, has view port, is able to be stored in a freezer
| Detachable, sealing up, has view port, is able to be stored in a freezer
|
Detachable, has view port
| ||
气体输入 | OsO4 ampoule is split in an OsO4 reservoir and its sublimated gas is introduced into gas reactor chamber. | OsO4 ampoule is split in an OsO4 reservoir and its subkimated gas is introduced into gas reactor chamber. |
电源 | AC100V 2A 200W(50/60Hz) | AC100V 2A 200W(50/60Hz) |
尺寸 | 450(w)x410(D)x390(H)mm | 450(w)x350(D)x330(H)mm |
重量 | Approx. 30kg | Approx. 20kg |
订购信息
货号 | 产品描述 | 规格 |
OPC-60A | 锇膜镀膜仪Osmium Plasma Coater | 台 |
OPC-80T | 锇膜镀膜仪Osmium Plasma Coater | 台 |
注：该仪器未取得中华人民共和国医疗器械注册证，不可用于临床诊断或治疗等相关用途
